Local oxidation nanolithography on Hf thin films using atomic force microscopy (AFM)
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Physics D: Applied Physics
سال: 2009
ISSN: 0022-3727,1361-6463
DOI: 10.1088/0022-3727/42/10/105302